pattern defect是什么意思_pattern defect中文

pattern defect中文什么意思

pattern: n. 1.模范，榜样；典范。 2.型，模型；模式；雏型； ...
defect: vi. 叛变；逃走。 He defected to th ...
flow pattern defect: 流体图案缺陷
defect: n. 1.缺陷，缺点，弱点；短处。 2.不足，缺乏。 have some defect in eyesight 目力不佳。 have the defects of one's qualities 美中不足之处。 in defect of 若无…时；因无。 vi. 叛变；逃走。 He defected to the West. 他叛逃到西方。
in defect of: 缺少; 若无...时

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The study results obtained by afm suggest that the flow pattern defects were revealed as having wedge shape and there were small octahedron voids surrounded by { 111 } which were the same as cops and lstds planes were observed at the tips of flow pattern defects
用原子力显微镜对fpds结构的研究结果表明， fpds缺陷形如抛物线，并且在其端部存在有和cops 、 lstds缺陷相同的由{ 111 }面构成的八面体空洞。
In this paper , the flow pattern defects ( fpds ) were revealed by secco etchant and their shape , distribution on wafer and tip structure were studied in details by optical microscope and atomic force microscope ( afm ) . the relationship between etching time and the tip structure of fpds was also discussed . furthermore , by studying the effect of rapid thermal annealing ( rta ) on the density of fpds in ar , the annihilation mechanism of fpds was discussed in this paper
本文将cz硅单晶片在secco腐蚀液中择优腐蚀后，用光学显微镜和原子力显微镜对流动图形缺陷( flowpatterndefects , fpds )在硅片中的形态、分布及其端部的微观结构进行了仔细地观察和研究，并讨论了腐蚀时间对fpds缺陷端部结构的影响；本文还通过研究ar气氛下快速退火( rapidthermalannealing , rta )对fpds缺陷密度的影响，初步探讨了fpds的消除机理。

pattern defect中文什么意思